Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Design and characteristics of non-contact (confocal microscopy) instruments
Abstract
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
Begin
2024-09-23
WI
00290267
Planned document number
DIN EN ISO 25178-607 rev
Project number
15202930
Responsible national committee
NA 152-03-02 AA - CEN/ISO Geometrical product specifications and verification
Responsible european committee
CEN/TC 290 - Dimensional and geometrical product specification and verification
Responsible international committee
ISO/TC 213/WG 16 - Areal and profile surface texture
