Project
The recognition criteria of defects in polished indium phosphide wafers - Part 1: Classification of defects
Abstract
This part of standard is intended to classify defects observed on commercially available Indium Phosohide (InP) wafers. This provides terms, difinitions, and observation images of defects. The defect terminology is reviewed and adapted where necessary
Begin
2024-07-09
Planned document number
DIN EN IEC 63581-1
Project number
02232424
