Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
Abstract
This document specifies methods for tactile topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
Begin
2024-05-15
Planned document number
DIN 32567-3
Project number
02703434
Responsible national committee
NA 027-03-03 AA - Production equipment for microsystems
draft standard
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
2024-11
Order from DIN Media
