Abstract

This European Standard specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment. An MSLD has an integral high vacuum system for maintaining the sensing element (mass spectrometer) at low operating pressure and for establishing a partial pressure related to the incoming gas flow.

Begin

2023-12-18

WI

00138302

Planned document number

DIN EN 1518 rev

Project number

06236666

Responsible national committee

NA 062-11-15 AA - Leak detection methods  

Responsible european committee

CEN/TC 138/WG 6 - Leak Testing  

previous edition(s)

Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors; German version EN 1518:1998
1998-06

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Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors; German version EN 1518:1998
2019-06

Order from DIN Media