Abstract

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

Begin

2022-10-18

WI

00290255

Planned document number

DIN EN ISO 25178-603

Project number

15202840

Responsible national committee

NA 152-03-03 AA - Surfaces  

Responsible european committee

CEN/TC 290 - Dimensional and geometrical product specification and verification  

Responsible international committee

ISO/TC 213/WG 16 - Areal and profile surface texture  

draft standard

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178-603:2023); German and English version prEN ISO 25178-603:2023
2023-12
Order from DIN Media

previous edition(s)

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013); German version EN ISO 25178-603:2013
2014-02

Order from DIN Media