Abstract

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) systems for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

Begin

2022-10-18

WI

00290256

Planned document number

DIN EN ISO 25178-604

Project number

15202839

Responsible national committee

NA 152-03-03 AA - Surfaces  

Responsible european committee

CEN/TC 290 - Dimensional and geometrical product specification and verification  

Responsible international committee

ISO/TC 213/WG 16 - Areal and profile surface texture  

draft standard

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023); German and English version prEN ISO 25178-604:2023
2023-11
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previous edition(s)

Geometrical product specification (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013); German version EN ISO 25178-604:2013
2013-12

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