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Project

IEC 62047-21 Ed.1: Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Begin

2013-04-05

Planned document number

IEC 47F/147A/CDV

Responsible national committee

DKE/K 631 - Halbleiterbauelemente  

Responsible international committee

IEC/SC 47F - Micro-electromechanical systems  

Contact

Elena Rongen

Merianstr. 28
63069 Offenbach am Main

Tel.: +49 69 6308-429

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