Project
Future IEC 62047-16: Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films; wafer curvature and cantilever beam deflection methods
Begin
2011-09-30
Planned document number
IEC 47F/107/NP
Responsible national committee
DKE/K 631 - Halbleiterbauelemente
