NA 062-02-21 AA
Testing of process materials for semiconductor technology

Working Committee NA 062-02-21 AA "Testing of process materials for semiconductor technology" develops and maintains standards on the chemical analysis and characterization of process materials for semiconductors. It also deals with the development and application of analytical methods and techniques in this area. One focus of the Committee is the trace analysis of process chemicals, particularly the performance of interlaboratory tests for the purposes of method validation, with the participation of manufacturers, research institutions and users.