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Standards [CURRENT]

NF C96-050-2 ; NF EN 62047-2:2006-11-01
Semiconductor devices - Micro-electromechanical devices - Part 2: tensile testing methods of thin film materials

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 2: Prüfverfahren zur Zugbeanspruchung bei Dünnschicht-Werkstoffen

Edition 2006-11-01
Original language French
Price from 90.10 €
Table of contents