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Standards [CURRENT]

ISO 17331
Surface chemical analysis - Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

Title (German)

Chemische Analytik an Oberflächen - Chemische Methoden für die Sammlung von Elementen von der Oberfläche von Siliziumscheiben-Arbeits-Referenzmaterialien und deren Bestimmung mit Totalreflexions-Röntgenfluoreszenzanalyse (TXRF)

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201 - Surface chemical analysis  

Edition 2004-05
Original language English
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Table of contents

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