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Technical rule [Withdrawn]

PAS 1022
Reference procedure for the determination of optical and dielectric material properties and the layer thickness of thin films by ellipsometry

Title (German)

Referenzverfahren zur Bestimmung von optischen und dielektrischen Materialeigenschaften sowie der Schichtdicke dünner Schichten mittels Ellipsometrie

Procedure

PAS

Edition 2004-02
Original language German , English
Price from 80.20 €

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Dipl.-Ing.

So-Jin Kim

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10787 Berlin

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