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Standards [New]

DIN 50451-4
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 4: Bestimmung von 34 Elementen in hochreinem Wasser durch Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS)

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology

Edition 2024-09

Original language German

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Table of contents

PDF (DE)

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Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

DIN 50451-4 Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

Responsible national committee

Denise Winter

Want to learn more?

DIN 50451-4
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)