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Hydrogen Technologies Standards form the basic framework for market ramp-up
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Climate change Standards and specifications support climate targets
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Draft standard

23/30454374 DC
BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices. Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures

Edition 2023-04-20

Original language English

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Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

23/30454374 DC BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices. Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures

Want to learn more?

23/30454374 DC
BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices. Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures