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Standards [CURRENT]

ISO 14606
Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials

Title (German)

Chemische Oberflächenanalyse - Tiefenprofilierung mit Sputtern - Optimierung durch Nutzung von Referenz-Schichtsystemen

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 4 - Depth profiling  

Edition 2022-11
Original language English
Price from 106.30 €
Table of contents

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