DIN EN ISO 14644-9
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022); German version EN ISO 14644-9:2022
Reinräume und zugehörige Reinraumbereiche - Teil 9: Bewertung der partikulären Oberflächenreinheit (ISO 14644-9:2022); Deutsche Fassung EN ISO 14644-9:2022
Document: references other documents
Document: referenced in other documents
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible european committee
CEN/TC 243 - Cleanroom technology
Responsible international committee
ISO/TC 209 - Cleanrooms and associated controlled environments