Standards
[CURRENT]
ISO 14644-9
ISO 14644-9
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration
Title (German)
Reinräume und zugehörige Reinraumbereiche - Teil 9: Bewertung der partikulären Oberflächenreinheit
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible international committee
ISO/TC 209 - Cleanrooms and associated controlled environments