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Standards [CURRENT]

DIN 50450-9
Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C₁-C₃-hydrocarbons in gaseous hydrogen chloride by gaschromatography

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Verunreinigungen in Träger- und Dotiergasen - Teil 9: Bestimmung von Sauerstoff, Stickstoff, Kohlenstoffmonooxid, Kohlenstoffdioxid, Wasserstoff und C₁-C₃-Kohlenwasserstoffen in Chlorwasserstoff mit Gaschromatographie

Responsible national committee

NA 062-05-73 AA - Gas analysis and gas quality  

Edition 2021-07
Original language German
Price from 42.10 €
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Table of contents

Contact

Dipl.-Ing.

Florian Rieger

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10787 Berlin

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