Technical rule
[CURRENT]
VDI 2083 Blatt 1.1
VDI 2083 Blatt 1.1
Cleanroom technology - Particulate air cleanliness classes for nano-scaled particles (ACnP)
Title (German)
Reinraumtechnik - Partikelreinheitsklassen der Luft anhand nanopartikulärer Konzentration (ACnP)