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Standards [CURRENT]

ISO 22278
Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Title (German)

Hochleistungskeramik - Prüfmethode für die kristalline Qualität von Siliciumcarbid (SiC) -Einkristallen unter Verwendung von hochauflösender Röntgenbeugung XRD

Responsible national committee

NA 062-02-91 AA - Terminology associated with advanced technical ceramics and testing of monolithic ceramics and powders  

Responsible international committee

ISO/TC 206/WG 7 - Monolithic ceramics/ Physical, mechanical and thermal properties  

Edition 2020-08
Original language English
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Table of contents

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