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Standards [CURRENT]

ISO 16413
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Title (German)

Bestimmung der Dicke, Dichte und Grenzflächenbreite von Dünnschichten durch Röntgenreflektometrie - Geräteanforderungen, Einstellung und Positionierung, Datensammlung, Datenanalyse und Berichterstattung

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201 - Surface chemical analysis  

Edition 2020-08
Original language English
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Table of contents

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