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Standards [CURRENT]

DIN ISO 18516
Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

Title (German)

Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung (ISO 18516:2019); Text Englisch

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 2 - General procedures  

Edition 2020-11
Original language English
Price from 146.40 €
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Table of contents

Contact

Steffen Jenkel

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10787 Berlin

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