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Hydrogen Technologies Standards form the basic framework for market ramp-up
More information
Climate change Standards and specifications support climate targets
More information
Smart Farming Standards and specifications are drivers for the digitalization of agriculture
More information

Standards [CURRENT]

ISO 21466
Microbeam analysis - Scanning electron microscopy - Method for evaluating critical dimensions by CD-SEM

Title (German)

Mikrobereichsanalyse - Rasterelektronenmikroskopie - Verfahren zur Bewertung kritischer Maße durch CD-SEM

Responsible national committee

NA 062-08-18 AA - Electron microscopy and microbeam analysis

Responsible international committee

ISO/TC 202/SC 4 - Scanning electron microscopy

Edition 2019-12

Original language English

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Terminology

Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

ISO 21466 Microbeam analysis - Scanning electron microscopy - Method for evaluating critical dimensions by CD-SEM

Responsible national committee

Responsible international committee

Steffen Jenkel

Want to learn more?

ISO 21466
Microbeam analysis - Scanning electron microscopy - Method for evaluating critical dimensions by CD-SEM