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Technical rule [CURRENT]

VDI/VDE 2655 Blatt 1.3
Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

Title (German)

Optische Messtechnik an Mikrotopografien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung

Edition 2020-02
Original language German , English
Price from 123.60 €
Table of contents