Pre-standard
ISO/TS 25138
ISO/TS 25138
Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry
Title (German)
Chemische Oberflächenanalyse - Analyse von Metalloxidfilmen mit optischer Glimmentladungs-Emissionsspektrometrie
Responsible national committee
NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy