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Standards [CURRENT]

ISO 21859
Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

Title (German)

Hochleistungskeramik - Prüfverfahren für die Plasmabeständigkeit keramischer Bauteile in Halbleiterfertigungsanlagen

Responsible national committee

NA 062-02-91 AA - Terminology associated with advanced technical ceramics and testing of monolithic ceramics and powders

Responsible international committee

ISO/TC 206/WG 12 - Engineering applications and porous ceramics

Edition 2019-06

Original language English

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Table of contents

PDF (EN)

Contact

Steffen Jenkel

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10787 Berlin

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