ISO 14644-12
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Reinräume und zugehörige Reinraumbereiche - Teil 12: Spezifikationen für die Überwachung der Luftreinheit anhand der Nanopartikelkonzentration
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible international committee
ISO/TC 209 - Cleanrooms and associated controlled environments