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Standards [CURRENT]

NF C96-050-25 ; NF EN 62047-25:2016-12-30
Semiconductor devices - Micro-electromechanical devices - Part 25: silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 25: siliziumbasierte MEMS-Herstellungstechnologie - Messverfahren zur Zug-Druck- und Scherfestigkeit gebondeter Flächen im Mikrometerbereich

Edition 2016-12-30
Original language French
Price from 105.40 €
Table of contents