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Standards [CURRENT]

OVE EN 62047-26
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (IEC 62047-26:2016) (german version)

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen (IEC 62047-26:2016) (deutsche Fassung)

Edition 2017-01-01
Original language German
Price from 130.61 €
Table of contents