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Standards [CURRENT]

DIN 50452-1
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Teilchenanalytik in Flüssigkeiten - Teil 1: Mikroskopische Teilchenbestimmung

Document: references other documents

Document: referenced in other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology

Edition 1995-11

Original language German

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