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Standards [CURRENT]

DIN 50452-3
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Teilchenanalytik in Flüssigkeiten - Teil 3: Kalibrierung von optischen Durchflußpartikelzählern

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 1995-10
Original language German
Price from 42.10 €
Order from DIN Media
Table of contents

Contact

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