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Standards [CURRENT]

NF C96-050-26 ; NF EN 62047-26:2016-06-25
Semiconductor devices - Micro-electromechanical devices - Part 26: description and measurement methods for micro trench and needle structures

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen

Edition 2016-06-25
Original language French
Price from 118.70 €
Table of contents