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Hydrogen Technologies Standards form the basic framework for market ramp-up
More information
Climate change Standards and specifications support climate targets
More information
Smart Farming Standards and specifications are drivers for the digitalization of agriculture
More information

Standards [CURRENT]

BS EN 62047-26
Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures

Title (German)

Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen

Edition 2016-05-31

Original language English

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Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

BS EN 62047-26 Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures

Want to learn more?

BS EN 62047-26
Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures