DIN ISO 14999-4
Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 4: Interpretation and evaluation of tolerances specified in ISO 10110 (ISO 14999-4:2015)
Optik und Photonik - Interferometrische Messung von optischen Elementen und Systemen - Teil 4: Interpretation und Beurteilung der Toleranzen nach ISO 10110 (ISO 14999-4:2015)
Overview
This part of ISO 14999 applies to the interpretation of interferometric data relating to the measurement of optical elements and provides the theoretical background for determining the data for ISO 10110-5 and/or ISO 10110-14. It is common practice to measure surface form deviation interferometrically as the wavefront deformation caused by a single reflection from the optical surface at normal incidence. Therefore, it is possible to present the interferometric evaluation in a uniform manner so that it can be used for both applications. One "fringe spacing" is equal to a surface form deviation that causes a deformation of the reflected wavefront of one wavelength.
