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Standards [CURRENT]

ISO 13083
Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Title (German)

Chemische Oberflächenanalyse - Rastersondenmikroskopie - Standards zur Definition und Kalibrierung der räumlichen Auflösung von Rasterausbreitungswiderstandsmikroskopie und Rasterkapazitätsmikroskopie

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 9/WG 6 - Use of ESPM  

Edition 2015-08
Original language English
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Table of contents

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