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Hydrogen Technologies Standards form the basic framework for market ramp-up
More information
Climate change Standards and specifications support climate targets
More information
Smart Farming Standards and specifications are drivers for the digitalization of agriculture
More information

Standards [CURRENT]

BS EN 62047-16
Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films Wafer curvature and cantilever beam deflection methods

Title (German)

Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Messverfahren zur Ermittlung der Eigenspannungen in Dünnschichten von MEMSBauteilen. Substratkrümmungs- und Biegebalken-Verfahren

Edition 2015-07-31

Original language English

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Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

BS EN 62047-16 Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films Wafer curvature and cantilever beam deflection methods

Want to learn more?

BS EN 62047-16
Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films Wafer curvature and cantilever beam deflection methods