DIN 32567-4
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures
Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 4: Prüfkörper für optische Verfahren
Overview
This document has been prepared by Working Committee NA 027-03-03 AA "Fertigungsmittel für Mikrosysteme" ("Production equipment for microsystems") at the Standards Committee Optics and Precision Mechanics (NAFuO) at DIN. DIN 32567-4 specifies methods for the tactile topographic measurement of the layer thickness of layer systems in which the layer and substrate have different mechanical properties, with which the systematic deviations of the measured layer thickness can be determined. This document can also be used on scanning coordinate measuring machines with tactile sensor and atomic force microscopes in contact mode. This standard primarily aims at the material pairing of soft, yielding layers on hard, stiff substrates. The most important prerequisite for the application of the draft standard is the possibility of topographic layer thickness measurement; that is, the layer must be measurable as a profile step.
