DIN 32567-1
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences
Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 1: Qualitative Abschätzung der material- und verfahrensspezifischen Einflüsse
Overview
This document has been prepared by Working Committee NA 027-03-03 AA "Fertigungsmittel für Mikrosysteme" ("Production equipment for microsystems") at the Standards Committee Optics and Precision Mechanics (NAFuO) at DIN. DIN 32567-1 specifies methods for the measurement of the layer thickness and step height of the shape of inhomogeneous materials with scanning section, white light interference, phase shift interference and confocal microscopic measuring instruments with which the systematic deviations of the measured layer thickness or step height due to material influences can be determined. The dimensional measurement of microcomponents is an essential task of microproduction technology. Due to their size in the µm range and the material properties, the measurement of the structures poses a particular challenge to the specific measuring task. To date, the calibration procedures have largely been based on idealized assumptions. For example, the test specimens are made of stiff, well reflecting, homogeneous material, so that the elastic/plastic deformation of the test specimen can be neglected during tactile measurement. The same applies to the influence of optical material properties on optical measurement. Particularly in microdimensions, the material-specific properties are gaining in importance. For this reason, test specimens coated with various technically relevant materials (metals, plastics) have been developed for the purpose of determining the influence of material on dimensional measurement.
