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Standards [CURRENT]

DIN 50451-3
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 3: Bestimmung von 31 Elementen in hochreiner Salpetersäure mittels ICP-MS

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 2014-11
Original language German
Price from 77.90 €
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Table of contents

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