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Standards [CURRENT]

ISO 14706
Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

Title (German)

Chemische Oberflächenanalyse - Bestimmung der Oberflächenkontaminationen auf Silizium-Wafern mit Hilfe der "Total X-Ray Fluorescence Spectroscopy" (TXRF)

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201 - Surface chemical analysis  

Edition 2014-08
Original language English
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Table of contents

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