DIN 32567-3
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 3: Ableitung von Korrekturwerten für taktile Messgeräte
Overview
This document has been prepared by Working Committee NA 027-03-03 AA "Fertigungsmittel für Mikrosysteme" ("Production equipment for microsystems") at the Standards Committee Optics and Precision Mechanics (NAFuO) at DIN. This standard is intended to provide recommendations regarding a method for determining the systematic errors of tactile topographical coating thickness measurements in case coating and substrate have different mechanical characteristics. The standard describes a method to determine and correct these systematic errors of contact stylus instruments. The standard is also applicable to scanning coordinate measurement systems with tactile sensor and atomic force microscopy in contact mode. The standard is primarily intended for the material combination of a soft, yielding coating on a hard, rigid substrate. Most important prerequisite for the application of this standard is the feasibility of a topographical coating thickness measurement, that is, the coating has to be measurable as a difference in the surface topography. The standard is applicable to tactile coating thickness measurements on any workpiece.
