DIN 32567-2
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 2: Prüfkörper für taktile Verfahren
Overview
This document has been prepared by Working Committee NA 027-03-03 AA "Fertigungsmittel für Mikrosysteme" ("Production equipment for microsystems") at the Standards Committee Optics and Precision Mechanics (NAFuO) at DIN. This standard is intended to provide recommendations regarding specimens for determining the systematic errors of topographical coating thickness measurements in case coating and substrate have different physical characteristics. In topographical coating thickness measurements, the coating is presented by a difference of the surface topography with respect to the underlying substrate. This part of the standard describes requirements for specimens which enable determination of the systematic errors of contact stylus instruments. It describes an example specimen with soft coatings on hard substrates.
