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Standards [CURRENT]

NF C96-050-11 ; NF EN 62047-11:2014-03-12
Semiconductor devices - Micro-electromechanical devices - Part 11: test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 11: Prüfverfahren für lineare thermische Ausdehnungskoeffizienten für freistehende Werstoffe der Mikrosystemtechnik

Edition 2014-03-12
Original language French
Price from 105.40 €
Table of contents