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Standards [CURRENT]

SN EN 62047-13
Semiconductor devices - Microelectromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strenght for MEMS structures

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 13: Biege- und Scherprüfverfahren zur Messung der Haftfestigkeit bei MEMS - Strukturen

Edition 2012-04
Original language German
Price from 25.80 €
Table of contents