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Standards [CURRENT]

SN EN 62047-14
Semiconductor devices - Microelectromechanical devices - Part 14: Forming limit measuring method of metallic film materials

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 14: Verfahren zur Ermittlung der Grenzformänderung metallischer Dünnschichtwerkstoffe

Edition 2012-04
Original language German
Price from 25.80 €
Table of contents