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Hydrogen Technologies Standards form the basic framework for market ramp-up
More information
Climate change Standards and specifications support climate targets
More information
Smart Farming Standards and specifications are drivers for the digitalization of agriculture
More information

Standards [CURRENT]

NF C96-050-10 ; NF EN 62047-10:2012-12-01
Semiconductor devices - Micro-electromechanical devices - Part 10: micro-pillar compression test for MEMS materials

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 10: Druckprüfverfahren an zylinderförmigen Mikroproben für Werkstoffe der Mikrosystemtechnik

Edition 2012-12-01

Original language French

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Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

NF C96-050-10 ; NF EN 62047-10:2012-12-01 Semiconductor devices - Micro-electromechanical devices - Part 10: micro-pillar compression test for MEMS materials

Want to learn more?

NF C96-050-10 ; NF EN 62047-10:2012-12-01
Semiconductor devices - Micro-electromechanical devices - Part 10: micro-pillar compression test for MEMS materials