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Standards [CURRENT]

SN EN 62047-8
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 8: Streifen-Biege-Prüfverfahren zur Messung von Zugbeanspruchungsmerkmalen dünner Schichten

Edition 2011-05
Original language German
Price from 25.80 €
Table of contents