DIN EN 62047-5
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches (IEC 62047-5:2011); German version EN 62047-5:2011
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter (IEC 62047-5:2011); Deutsche Fassung EN 62047-5:2011
Overview
The RF MEMS switches are promising devices in advanced mobile phones with multi-band/mode operation, smart radar systems, reconfigurable RF devices and systems, SDR phones, test equipment, tunable devices and systems, satellite, etcetera. These devices are increasingly also manufactured in particularly small sizes as micro-electromechanical devices in order to fulfil the requirements for the dimensions made available. For this purpose, these devices shall ensure the required performance conditions. This part of DIN EN 62047 describes the terminology, definitions, symbols and test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches. The specifications of this standard are also applicable to RF MEMS switches with various structures, contacts (d.c. contact or capacitive contact), configurations (series or shunt), switching networks (SPST, SPDT, DPDT, etcetera), and actuation mechanism such as electrostatic, electro-thermal, electromagnetic, piezoelectric, etcetera. The responsible committee is K 631 "Halbleiterbauelemente" ("Semiconductor devices") of the DKE (German Commission for Electrical, Electronic and Information Technologies) at DIN and VDE.
