DIN EN 60749-7
Semiconductor devices - Mechanical and climatic test methods - Part 7: Internal moisture content measurement and the analysis of other residual gases (IEC 60749-7:2011); German version EN 60749-7:2011
Halbleiterbauelemente - Mechanische und klimatische Prüfverfahren - Teil 7: Messung des inneren Feuchtegehaltes und Analyse von anderen Restgasen (IEC 60749-7:2011); Deutsche Fassung EN 60749-7:2011
Overview
This document specifies the testing and measurement of water vapour and other gas content of the atmosphere inside a metal or ceramic hermetically sealed device. The test is used as a measure of the quality of the hermetic sealing process and to provide information about the long-term chemical stability of the atmosphere inside the package. This method is applicable to all semiconductor devices sealed in such a manner but generally only used for high reliability applications such as military and aerospace. This test is destructive. The standard replaces DIN EN 60749-7:2003-04; the following modifications have been made: a) The specifications have been aligned with the respective methods 1018 of the latest documents MIL-STD-750 and MIL-STD-883. b) The current alternative methods, formerly designated method 2 and method 3, have been deleted. c) For this purpose, the standard has been technically and editorially revised. The responsible committee is K 631 "Halbleiterbauelemente" ("Semiconductor devices") of the DKE (German Commission for Electrical, Electronic and Information Technologies) at DIN and VDE.
