DIN EN 62047-7
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection (IEC 62047-7:2011); German version EN 62047-7:2011
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 7: BAW-MEMS-Filter und -Duplexer zur Hochfrequenz-Regelung und -Auswahl (IEC 62047-7:2011); Deutsche Fassung EN 62047-7:2011
Overview
BAW resonators, filters and duplexers (BAW: bulk acoustic waves) are used as devices for stabilization and selection of radio frequency (RF) signals. These devices are increasingly being fabricated in particularly small sizes, also as micro-electromechanical devices, in order to meet the requirements for the available dimensions. In this context, these devices shall ensure the required performance conditions. The main structural materials for micro-electromechanical devices, micromachines, etcetera, have special features, such as the typical dimensions of a few micrometers, material fabrication by vapour deposition, and micro test piece fabrication by means of non-mechanical machining, including photolithography. Thin film materials are the main structural materials for micro-electromechanical devices (MEMS), micromachines and similar machines. This part of the DIN EN 62047 series specifies terms, definitions, symbols, configurations, and test and measurement methods that can be used to evaluate and determine the performance characteristics of BAW resonators, filters, and duplexer devices as radio frequency control and selection devices. This document specifies the test and measurement methods and general requirements for BAW resonators, filters, and duplexer devices of assessed quality to be used either for capability or qualification approval procedures. The responsible committee is K 631 "Halbleiterbauelemente" ("Semiconductor devices") of the DKE (German Commission for Electrical, Electronic and Information Technologies) at DIN and VDE.
